Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials
Founded at 2009

Features of the formation of an array of isolated polymer P(VDF-TrFE) nanoparticles in pores of a periodic nanostructured silicon oxide membrane

A.N. Belov1, N.V. Vostrov2, G.N. Pestov1, A.V. Solnyshkin2

1 National Research University of Electronic Technology
2 Tver State University

DOI: 10.26456/pcascnn/2023.15.629

Original article

Abstract: This work is devoted to the technological features of creating an array of pyroelectric nanoparticles placed in the pores of a silicon oxide membrane, ensuring their thermal insulation both from each other and from the supporting substrate. Mechanisms of anodic oxidation of the Al/Ti/SiOstructure, ensuring the self-organization of a nanostructured oxide mask with specified geometric parameters, have been established. It has been shown that from a certain thickness of the adhesion layer, overgrowing of the open areas of the mask with titanium oxide nanoparticles does not occur. The regularities of the method of local ion etching of multilayer structures are determined, which ensures control of the depth of the formed pores by controlling the ion current. A correlation has been established between the lateral size of the cavities in silicon and the aspect ratio of aluminum oxide pores. The possibility of forming a silicon oxide membrane with pyroelectric polymer nanoparticles embedded in its pores has been demonstrated.

Keywords: polymeric ferroelectric, porous silicon oxide, ion-beam etching, IR – photodetector ,porous anodic alumina, micromembrane, anisotropic etching

  • Alexey N. Belov – Dr. Sc., Professor, Integrated Electronics and Microsystems Department, National Research University of Electronic Technology
  • Nikita V. Vostrov – Junior Researcher, Management of Scientific Research, Tver State University
  • Grigory N. Pestov – assistant, Integrated Electronics and Microsystems Institute, National Research University of Electronic Technology
  • Alexander V. Solnyshkin – Dr. Sc., Professor, Condensed Matter Physics Department, Tver State University


Belov, A.N. Features of the formation of an array of isolated polymer P(VDF-TrFE) nanoparticles in pores of a periodic nanostructured silicon oxide membrane / A.N. Belov, N.V. Vostrov, G.N. Pestov, A.V. Solnyshkin // Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials. — 2023. — I. 15. — P. 629-636. DOI: 10.26456/pcascnn/2023.15.629. (In Russian).

Full article (in Russian): download PDF file


1. Yadav P., Yadav I., Ajitha B. et al. Advancements of uncooled infrared microbolometer materials: A review, Sensors and Actuators A: Physical, 2022, vol. 342, art. no. 113611, 19 p. DOI: 10.1016/j.sna.2022.113611.
2. Ambrosio R.C., Moreno M., Mireles J. et al. An overview of uncooled infrared sensors technology based on amorphous silicon and silicon germanium alloys, Physica Status Solidi C, 2010, vol. 7, issue 3-4, pp. 1180-1183. DOI: 10.1002/pssc.200982781.
3. Liu S., Guillet B., Aryan A. La0.7Sr0.3MnO3 suspended microbridges for uncooled bolometers made using reactive ion etching of the silicon substrates, Microelectronic Engineering, 2013, vol. 111, pp. 101-104. DOI: 10.1016/j.mee.2013.02.024.
4. Idczak K., Owczarek S., Markowski L. Platinum silicide formation on selected semiconductors surfaces via thermal annealing and intercalation, Applied Surface Science, 2022, vol. 572, art. no. 151345, 12 p. DOI: 10.1016/j.apsusc.2021.151345.
5. Varpula A., Tappura K., Tiira J. et al. Nano-thermoelectric infrared bolometers featured, APL Photonics, 2021, vol. 6, issue 3, art. no. 036111, 10 p. DOI: 10.1063/5.0040534.
6. Whatmore R.W., Ward S.J. Pyroelectric infrared detectors and materials – A critical perspective, Journal of Applied Physics, 2023, vol. 133, issue 8, art. no. 080902, 27 p. DOI: 10.1063/5.0141044.
7. Solnyshkin A.V., Morsakov I. M., Bogomolov A.A. et al. Dynamic pyroelectric response of composite based on ferroelectric copolymer of poly(vinylidene fluoride-trifluoroethylene) and ferroelectric ceramics of barium lead zirconate titanate, Applied Physics A, 2015, vol. 121, issue 1, pp. 311-316. DOI: 10.1007/s00339-015-9446-z.
8. Jeon G.-J., Kim W. Y., Lee H.C. Thin-film vacuum packaging based on porous anodic alumina (PAA) for infrared (IR) detection, Proceedings of the Sensors, 2012 IEEE, 28-31 October 2012, Taipei, 2012, pp. 1-4. DOI: 10.1109/ICSENS.2012.6411110.
9. Jeon G.-J., Kim W.Y., Shim H.B. Lee H.C. Nanoporous Pirani sensor based on anodic aluminum oxide, Applied Physics Letters, 2016, vol. 109, issue 12, art. no. 123505, 5 p. DOI: 10.1063/1.4963183.
10. Belov A.N. Local etching of silicon using a solid mask from porous aluminum oxide, Semiconductors, 2008, vol. 42, issue 13, pp. 1519-1521. DOI: 10.1134/S1063782608130149.
11. Belov A.N., Golishnikov A.A., Pestov G.N. et al. Formation of piezo- and pyroelectric matrices with the use of nanoprofiled silica, Nanotechnologies in Russia, 2018, vol. 13, issue 6, pp. 609-613. DOI: 10.1134/S1995078018060034.
12. Belov A.N., Demidov Yu.A., Putrya M.G. et al. Silicon nanoprofiling with the use of a solid aluminum oxide mask and combined «dry» etching, Semiconductors, 2009, vol. 43, issue 13, pp. 1660-1662. DOI: 10.1134/S1063782609130090.
13. Belov A.N., Gavrilov S.A., Demidov Yu.A., Shevyakov V.I. Features of the formation of porous alumina mask for local plasma etching of semiconductors, Nanotechnologies in Russia, 2011, vol. 6, issue 11-12, pp. 711-716. DOI: 10.1134/S199507801106005X.
14. Belov A.N., Kislova I.., Loktev D.V. et al. Electrical characterization of poly(vinylidene fluoridetrifluoroethylene) nanocrystals embedded in porous alumina matrix, Journal of Advanced Dielectrics, 2018, vol. 8, issue 1, art. no. 1820001, 5 p. DOI: 10.1142/S2010135X18200011.

⇐ Prevoius journal article | Content | Next journal article ⇒