Nanostructure and ferroelectric properties of nanoscale BaTiO3/SrRuO3/MgO(001) films
D.A. Kiselev2,1, D.V. Stryukov3, A.V. Pavlenko3
1 Fryazino Branch of V.A. Kotelnikov Institute of Radio Engineering and Electronics of RAS
2 National University of Science and Technology «MISIS»
3 Federal Research Centre The Southern Scientific Centre of theRAS
DOI: 10.26456/pcascnn/2025.17.092
Original article
Abstract: High-quality ferroelectric BaTiO3/SrRuO3/MgO(001) heterostructures with BaTiO3 film thicknesses ranging from 36 to 360 nm were synthesized using high-frequency cathode sputtering in an oxygen atmosphere. A comprehensive study of their crystal structure, surface morphology, piezoelectric and ferroelectric properties was conducted using X-ray structural analysis and scanning probe microscopy. It was established that all the obtained films are single-phase and heteroepitaxial. X-ray diffraction measurements revealed a significant deformation of the unit cell, which reaches a maximum (~4,4%) for the thinnest films and decreases with increasing thickness. It was shown that the surface roughness of the films, estimated from scanning probe microscopy data, systematically increases with thickness, following a scaling law. Piezoresponse force microscopy demonstrated the possibility of local polarization switching in the films and revealed an increase in the magnitude of the residual piezoelectric response with the growth of the ferroelectric layer thickness. The surface potential of the films was measured by Kelvin probe force spectroscopy, and a tendency for it to decrease with increasing thickness was established. The paper discusses the reasons for the observed patterns. The obtained results are important for understanding size effects in nanoscale ferroelectric films and their applications in microelectronics and functional devices.
Keywords: ferroelectric, BaTiO3, dielectric characteristics, scanning probe microscopy, polarization
- Dmitry A. Kiselev – Ph. D., Head of the Department of Materials Science of Semiconductors and Dielectrics, National University of Science and Technology «MISIS», Senior Researcher Fryazino Branch of V.A. Kotelnikov Institute of Radio Engineering and Electronics of RAS
- Daniil V. Stryukov – Ph. D., Senior Researcher at the Department of Physics, Chemistry, and Informatics, Federal Research Centre The Southern Scientific Centre of theRAS
- Anatoliy V. Pavlenko – Ph. D., Head of the Department of Physics, Chemistry, and Informatics, Federal Research Centre The Southern Scientific Centre of theRAS
For citation:
Kiselev D.A., Stryukov D.V., Pavlenko A.V. Nanostruktura i segnetoelektricheskie svojstva nanorazmernykh plenok BaTiO3/SrRuO3/MgO(001) [Nanostructure and ferroelectric properties of nanoscale BaTiO3/SrRuO3/MgO(001) films], Fiziko-khimicheskie aspekty izucheniya klasterov, nanostruktur i nanomaterialov [Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials], 2025, issue 17, pp. 092-101. DOI: 10.26456/pcascnn/2025.17.092. ⎘
Full article (in Russian): download PDF file
References:
1. Physics of ferroelectrics: a modern perspective, ed. by K.M. Rabe, C.H. Ahn, J.-M. Triscone. Berlin, Springer, 2007, XII+388 p. DOI: 10.1007/978-3-540-34591-6.
2. Setter N., Damjanovic D., Eng L. et al. Ferroelectric thin films: review of materials, properties, and applications, Journal of Applied Physics, 2006, vol. 100, issue 5, pp. 051606-1-051606-46. DOI: 10.1063/1.2336999.
3. Janolin P.-E. Strain on ferroelectric thin films, Journal of Materials Science, 2009, vol. 44, issue 19, pp. 5025-5048. DOI: 10.1007/s10853-009-3553-1.
4. Karvounis A., Timpu F., Vogler-Neuling V.V., Savo R., Grange R. Barium titanate nanostructures and thin films for photonics, Advanced Optical Materials, 2020, vol. 8, issue 20, art. no. 2001249, 23 p. DOI: 10.1002/adom.202001249.
5. Acosta M., Novak N., Rojas V. et al. BaTiO3-based piezoelectrics: Fundamentals, current status, and perspectives, Applied Physics Reviews, 2017, vol. 4, issue 4, pp. 041305-1-041305-53. DOI: 10.1063/1.4990046.
6. Everhardt A.S., Denneulin T., Grünebohm A. et al. Temperature-independent giant dielectric response in transitional BaTiO3 thin films, Applied Physics Reviews, 2020, vol. 7, issue 1, pp. 011402-1-011402-8. DOI: 10.1063/1.5122954.
7. Shin Y.J., Jiang J., Jia Y., Walker F.J., Ahn C.H. Low temperature growth of epitaxial ferroelectric BaTiO3, APL Materials, 2021, vol. 9, issue 4, pp. 041104-1-041104-6. DOI: 10.1063/5.0046624.
8. Komatsu K., Suzuki I., Aoki T. et al. In-plane ferroelectricity and enhanced Curie temperature in perovskite BaTiO3 epitaxial thin films, Applied Physics Letters, 2020, vol. 117, issue 7, art. no. 072902, 5 p. DOI: 10.1063/5.0013484.
9. Reddy Y.K.V., Mergel D., Reuter S., Buck V., Sulkowski M. Structural and optical properties of BaTiO3 thin films prepared by radio-frequency magnetron sputtering at various substrate temperatures, Journal of Physics D: Applied Physics, 2006, vol. 39, issue 6, pp. 1161-1168. DOI: 10.1088/0022-3727/39/6/023.
10. Sharma H.B.K., Sarma H.N.K., Mansingh A. Ferroelectric and dielectric properties of sol-gel processed barium titanate ceramics and thin films, Journal of Materials Science, 1999, vol. 34, issue 6, pp. 1385-1390. DOI: 10.1023/A:1004578905297.
11. Mukhortov V.M., Yuzuk Y.I. Geterostruktury na osnove nanorazmernykh segnetoelektricheskikh plenok: poluchenie, svojstva i primenenie [Heterostructures based on nanoscale ferroelectric films: production, properties and application], Rostov-on-Don, SSC RAS Publishing, 2008, 224 p. (In Russian).
12. Pavlenko A.V., Zinchenko S.P., Stryukov D.V., Kovtun A.P. Nanorazmernye plenki niobata bariya-strontsiya: osobennosti polucheniya v plazme vysokochastotnogo razryada, struktura i fizicheskie svojstva [Nanoscale barium strontium niobate films: features of production in hf discharge plasma, structure and physical properties], Rostov-on-Don, SSC RAS Publishing, 2022, 244 p. (In Russian).
13. Kwei G.H., Lawson A.C., Billinge S.J.L., Cheong S.-W. Structures of the ferroelectric phases of barium titanate, The Journal of Physical Chemistry, 1993, vol. 97, issue 10, pp. 2368-2377. DOI: 10.1021/j100112a043.