Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials
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Structure changing of submicron PZT films with a fine variation of the composition corresponding to morphotropic phase boundary

M.V. Staritsyn1, M.L. Fedoseev1, E.Yu. Kaptelov2, S.V. Senkevich2, I.P. Pronin2

1 NRC «Kurchatov Institute»– CRISM «Prometey»
2 Ioffe Institute

DOI: 10.26456/pcascnn/2021.13.400

Original article

Abstract: The paper discusses the possibility of a fine variation in the composition of submicron ferroelectric films of lead zirconate titanate solid solutions corresponding to a morphotropic phase boundary. Composition was varied by changing the distance from the target to the substrate in the range of 30–70 mm in an installation for radio-frequency magnetron sputtering of a ceramic target, in which films deposition occurred on a «cold» platinized silicon substrate. This made it possible to change the composition of the deposited films (i.e., the elemental ratio of Zr and Ti atoms) in the range of 0–1,5 % while maintaining the single-phase perovskite films annealed at 580 °С. In this case, the films were characterized by elemental inhomogeneity of the composition over the thickness, reaching several percents. The thickness of thin lead zirconate titanate layers was 500 nm. Changes in the microstructure and crystal lattice parameters were studied. The change in the composition of the films was accompanied by significant changes in the nature of the spherulite microstructure and growth texture. A sharp jump in the quasi-cubic crystal lattice parameter was discovered, which may be caused by the phase transformation of the ferroelectric phase – from the rhombohedral modification to the two-phase state, presumably consisting of monoclinic and tetragonal modifications.

Keywords: lead zirconate titanate solid solutions, thin films, morphotropic phase boundary, fine variation in composition, microstructure

  • Mikhail V. Staritsyn – Engineer, NRC «Kurchatov Institute»– CRISM «Prometey»
  • Mikhail L. Fedoseev – Engineer, NRC «Kurchatov Institute»– CRISM «Prometey»
  • Evgeny Yu. Kaptelov – Ph. D., Senior Researcher, Ioffe Institute
  • Stanislav V. Senkevich – Ph. D., Researcher, Ioffe Institute
  • Igor P. Pronin – Dr. Sc., Senior Researcher, Ioffe Institute


Staritsyn, M.V. Structure changing of submicron PZT films with a fine variation of the composition corresponding to morphotropic phase boundary / M.V. Staritsyn, M.L. Fedoseev, E.Yu. Kaptelov, S.V. Senkevich, I.P. Pronin // Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials. — 2021. — I. 13. — P. 400-410. DOI: 10.26456/pcascnn/2021.13.400. (In Russian).

Full article (in Russian): download PDF file


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