Modification of silicon surface under influence of radiation of a nanosecond ultraviolet laser

T.V. Malinskiy¹, S.I. Mikolutskiy¹, V.E. Rogalin¹, Yu.V. Khomich¹, V.A. Yamshchikov¹, I.A. Kaplunov², A.I. Ivanova²

¹ Institute for Electrophysics and Electric Power, Russian Academy of Sciences (Director of Moscow Branch)
² Tver State University

DOI: 10.26456/pcascnn/2020.12.628

Original article

Abstract: The effect of radiation of a nanosecond ultraviolet laser (λ = 355 nm, pulse duration 10 ns, pulse energy up to 8 mJ, pulse repetition rate – up to 100 Hz) on a silicon single crystal has been investigated by methods of the optical profilometry and scanning electron microscopy. At an energy density of ≥ 1,2 J/сm², formation of the plasma torch and crater was observed. At an energy density of ≥ 0,2 J/сm², pockets of microbreakdown appeared on processing defects, and traces of uncontrolled surface uplift were recorded. Irradiation with a scanning laser beam at an energy density of 0,2 J/сm² forms microcraters on a surface with a size of several microns. With an increase in the energy density, the size of the microbreakdowns increased, and at an energy density ≥ 0,7 J/сm², the impact of the scanning beam forms a continuous damage zone.

Keywords: laser impact, silicon single crystal, UV laser, nanosecond pulse, micro- and nanomodification of the surface, plastic deformation

• Taras V. Malinskiy – Ph. D., Docent, Head of the Laboratory of Electric Discharge and Laser Technology, Institute for Electrophysics and Electric Power of the Russian Academy of Sciences (Moscow Branch)
• Sergey I. Mikolutskiy – Ph. D., Senior Researcher of Laboratory of Electrohydrodynamic systems, Institute for Electrophysics and Electric Power of the Russian Academy of Sciences
• Vladimir E. Rogalin – Dr. Sc., Head of Laboratory of Powerful Pulse Systems, Institute for Electrophysics and Electric Power of the Russian Academy of Sciences
• Yuriy V. Khomich – Researcher of Laboratory of Electric Discharge and Laser Technology, Institute for Electrophysics and Electric Power of the Russian Academy of Sciences
• Vladimir A. Yamshchikov – Corresponding Member of the Russian Academy of Sciences, Dr. Sc., Institute for Electrophysics and Electric Power, Russian Academy of Sciences (Director of Moscow Branch)
• Ivan A. Kaplunov – Dr. Sc., Chief of the Department of Applied Physics, Tver State University
• Alexandra I. Ivanova – Ph. D., Docent of the Applied Physic Department, Tver State University

Reference:

Malinskiy, T.V. Modification of silicon surface under influence of radiation of a nanosecond ultraviolet laser / T.V. Malinskiy, S.I. Mikolutskiy, V.E. Rogalin, Yu.V. Khomich, V.A. Yamshchikov, I.A. Kaplunov, A.I. Ivanova // Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials. — 2020. — I. 12. — P. 628-636. DOI: 10.26456/pcascnn/2020.12.628. (In Russian).

Full article (in Russian): download PDF file

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