AFM research of morphology of surface layer sapphire after plasma surface treatment

R.R. Nagaplezheva, M.M. Orakova, V.K. Luev
Kabardino-Balkarian State University named after H.M. Berbekov

DOI: 10.26456/pcascnn/2017.9.337

Abstract: An AFM study of the sapphire surface after plasma treatment was carried out. The AFM images of the sapphire surface in the initial state and after plasma treatment are obtained. It is established that after plasma treatment the arithmetic mean deviation of the surface profile increases and the surface becomes more homogeneous.
Keywords: plasma, scanning probe microscopy, atomic force microscopy, sapphire.

Bibliography link:
Nagaplezheva, R.R. AFM research of morphology of surface layer sapphire after plasma surface treatment / R.R. Nagaplezheva, M.M. Orakova, V.K. Luev // Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials: Interuniversity collection of proceedings / Ed. by V.M. Samsonov, N.Yu. Sdobnyakov. – Tver: TSU, 2017. – I. 9. – P. 337-340.

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