Magnetooptical control of spatial magnetic field distribution in microelectromechanical systems
M.K. Virchenko, R.M. Eguzhokova, A.B. Zaletov, A.I. Ivanova
Tver State University
Abstract: A study is performed of the spatial distribution of magnetic field of a microelectromechanical systems (MEMS) with the aid of magneto-optical indicator ferrite garnet films (MOIF). In order to increase the accuracy and the dynamic range of measure a procedure was developed including the use of auxiliary external field resulting in a controlled shift of the zero-field lines. In this case the MOIF serves as a null-indicator eliminating the dependence of the measuring results on the specific transfer parameters (linearity characteristics). Imposition of biasing field provides a possibility of shifting the saturation threshold field of the MOIF either in the region of positive or negative values.
Keywords: magnetic measurements, magneto-optical effects, indicator films, microelectromechanical systems (MEMS), dynamic range of measurement.
Virchenko, M.K. Magnetooptical control of spatial magnetic field distribution in microelectromechanical systems / M.K. Virchenko, R.M. Eguzhokova, A.B. Zaletov, A.I. Ivanova // Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials: Interuniversity collection of proceedings / Ed. by V.M. Samsonov, N.Yu. Sdobnyakov. – Tver: TSU, 2017. – I. 9. – P. 128-132.
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