CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY

D.L. Shimanovich

DOI: 10.26456/pcascnn/2015.7.533

Original article

Abstract: Volumetric-surface variants of capacitive MDM (metal-dielectric-metal) structures of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements were designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to preparing of alumina membranes with open-ended and widened pores without the barrier layer. Such technological approach allows to eliminate the effect of electrolyte anions embedded in pore walls on adsorption and desorption processes in humidity sensing elements.

Keywords: aluminum, electrochemical anodization, porous alumina, barrier layer, membrane, nanostructured material, humidity sensing element, adsorption, response time, recovery time, sensitivity

• D.L. Shimanovich

Reference:

Shimanovich, D.L. CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY / D.L. Shimanovich // Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials. — 2015. — I. 7. — P. 533-540. DOI: 10.26456/pcascnn/2015.7.533. (In Russian).

Full article (in Russian): download PDF file

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