INVESTIGATION OF INFLUENCE OF SCANNING STEP ON IR-TRANMISSION SPECTRA OF NITRIDE ALUMINUM FILMS

O.S. Zurkhaeva, D.S. Zurkhaev, L.P. Aref`eva

DOI: 10.26456/pcascnn/2015.7.208

Original article

Abstract: The influence of scanning step on IR-tranmission spectra of nitride aluminum films had been study. The optimal conditions of scanning, when the ratio «signal-noise» has minimum, had been determined.

Keywords: IR-spectroscopy, thin films, semiconductors

• O.S. Zurkhaeva
• D.S. Zurkhaev
• L.P. Aref`eva

Reference:

Zurkhaeva, O.S. INVESTIGATION OF INFLUENCE OF SCANNING STEP ON IR-TRANMISSION SPECTRA OF NITRIDE ALUMINUM FILMS / O.S. Zurkhaeva, D.S. Zurkhaev, L.P. Aref`eva // Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials. — 2015. — I. 7. — P. 208-215. DOI: 10.26456/pcascnn/2015.7.208. (In Russian).

Full article (in Russian): download PDF file

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