Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials
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ON PROSPECTS OF PRODUCTION AND APPLICATION OF AMORPHOUS CHALCOGENIDE FILMS GeSbTe

S.A. Baturkin

DOI: 10.26456/pcascnn/2015.7.101

Original article

Abstract: This work may be treated as a review of papers devoted to the structural transition from amorphous to crystalline state of chalcogenide films GeSbTe and the effect of memory related to the transition in question, i.e. to the keeping of the conductive state of the film in the absence of the external voltage for a long time. Besides, a review is presented of the result of author related to the improvement of the polylayer film technology.

Keywords: chalcogenide films, compounds germanium-antimony-tellurium, memory effect, polylayer films, technology

  • S.A. Baturkin

Reference:

Baturkin, S.A. ON PROSPECTS OF PRODUCTION AND APPLICATION OF AMORPHOUS CHALCOGENIDE FILMS GeSbTe / S.A. Baturkin // Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials. — 2015. — I. 7. — P. 101-110. DOI: 10.26456/pcascnn/2015.7.101. (In Russian).

Full article (in Russian): download PDF file

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