INVESTIGATION OF THICKNESS DEPENDENCES OF REFRACTIVE INDEX FOR NANOSIZED ACETONE FILM BY ELLIPSOMETRIC METHOD
N.Yu.. Sdobnyakov, N.V. Novozhilov, A.S. Antonov, E.A. Voronova, O.V. Mikhailova
DOI: 10.26456/pcascnn/2014.6.349
Original article
Abstract: On the basis of analyzing the spectrum of the ellipsometric angles ψ and ∆ the investigation of thickness dependence of refractive index for nanosized acetone films on silicon surface using the photometric spectroellipsometer was carried out.
Keywords: photometric spectroellipsometer, nanosized acetone films, refractive index, thickness dependence
- N.Yu.. Sdobnyakov
- N.V. Novozhilov
- A.S. Antonov
- E.A. Voronova
- O.V. Mikhailova
Reference:
Sdobnyakov N.Yu.., Novozhilov N.V., Antonov A.S., Voronova E.A., Mikhailova O.V. Issledovanie ellipsometricheskim metodom zavisimosti pokazatelya prelomleniya ot tolshchiny nanorazmernoj plenki atsetona [INVESTIGATION OF THICKNESS DEPENDENCES OF REFRACTIVE INDEX FOR NANOSIZED ACETONE FILM BY ELLIPSOMETRIC METHOD], Fiziko-khimicheskie aspekty izucheniya klasterov, nanostruktur i nanomaterialov [Physical and chemical aspects of the study of clusters, nanostructures and nanomaterials], 2014, issue 6, pp. 349-352. DOI: 10.26456/pcascnn/2014.6.349. ⎘
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